PROBE DIAGNOSTICS OF RADIOFREQUENCY DISCHARGE PLASMA IMPOSED BY ADDITIONAL ELECTROSTATIC FIELD
Abstract
In this work the experimental results of probe diagnostics of radiofrequency discharge plasma imposed by additional electrostatic field are presented. IV characteristics of the probe in combined plasma, as well as axial distribution of electrons temperature are presented.
Key words: radiofrequency discharge, plasma, electrostatic field, probe diagnostics, electron temperature.
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Utegenov, A. U., Ussenov, Y. A., Dosbolayev, M. K., & Ramazanov, T. S. (2021). PROBE DIAGNOSTICS OF RADIOFREQUENCY DISCHARGE PLASMA IMPOSED BY ADDITIONAL ELECTROSTATIC FIELD. THE JOURNAL OF THE OPEN SYSTEMS EVOLUTION PROBLEMS, 18(2), 23–27. Retrieved from https://peos.kaznu.kz/index.php/peos/article/view/99
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