INVESTIGATION OF COMPLEX PLASMA PROPERTIES IN RF DISCHARGE WITH AN ALTERNATIVE PHASE

Abstract

In this paper the results of investigation of the complex plasma properties of a high-frequency discharge with an alternative phase are we presented. Computer simulation of the complex plasma properties of a high-frequency discharge with an alternative phase was carried out based on the particle-in-cell and Monte Carlo methods. Spatio-temporal distributions of plasma characteristics of a high-frequency discharge with an alternative phase are obtained. It is shown that the application of the RF excitation signal to the alternative phase will lead to significant enhancements in the characteristics of the high-frequency discharge plasma. In the case of a voltage of alternative phase excitation, the dynamics of the electrons changes significantly. The strong heating of the electrons follows a rapid expansion of the sheath layers and, consequently, the density of electrons and ions, as well as the electron temperature, increase to higher values in comparison with the case of harmonic RF excitation.

Keywords: Complex plasma, Radiofrequency discharge,Particle in cell method, Monte-Carlo method.