OBTAINING OF NANOSTRUCTURED COMPOSITE PARTICLES AND FILMS IN A COMPLEX PLASMA BY MAGNETRON SPUTTERING

Abstract

This paper shows the results of experimental studies of various modes of obtaining composite dust particles with nanostructured surface layers, nanoparticles and films with nanolayers in a complex (dusty) gas discharge plasma using the direct current magnetron sputteringmethod.Also the effective parameters of the experimentwere determined. To obtain a complex plasma, a high-frequency capacitive gas discharge was applied. Such a complex plasma is an open system. The dust structure (crystal) in the plasma was formed by the injection of polydisperse spherical particles of glass by the specially developed mechanism. An aluminum nanolayer on the surface of the particulates was precipitated using magnetron sputtering. Carbon nanoparticles in the gas discharge volume are synthesized as a result of a plasma-chemical process by usingthe mixture of argon and methane gases (10%). The formation of carbon nanoparticles (their growth) consists of several stages, one of them is the formation of a single crystals from carbon nanoclusters with dimensions of 2-3 nm. The range of time spent on this process was determined experimentally. During the formation of a carbon monocrystal, a stream of sputtered copper microparticles is directed to them using a magnetron. As a result, we obtain composite nanoparticles consisting of carbon and copper. Thus, laboratory prototype of composite dust particles, nanoparticles, and films with nanostructured layers were obtained. A chemical analysis of the composition of the samples was carried out and their geometrical shape and dimensions were determined using an electron microscope.

Keywords: high-frequency capacitive gas discharge, complex (dusty) plasma, plasma-dust structure, magnetron sputtering.