SIMULATION OF MAIN PROPERTIES OF COMPLEX PLASMA IN RF DISCHARGE

Abstract

In this paper a numerical model to describe the basic properties of complex plasma in radio-frequency capacitive discharge is presented. The algorithm for calculating the particle-in-cell and Monte Carlo is shown. The results of modeling of kinetic and transport properties (density of electrons and ions, the electron temperature, the electron current, the speed of the electrons and ions heating) of complex plasma are presented. It is shown that most of the ionization occurs inside and in front of the advanced sheath of the strong acceleration of the relatively small number of gamma-electrons emitted from the electrodes in a strong electric field due to secondary electron emission.

Key words: Complex plasma, Radiofrequency discharge, Particle in cell method, Monte-Carlo method