PROBE DIAGNOSTICS OF RADIOFREQUENCY DISCHARGE PLASMA IMPOSED BY ADDITIONAL ELECTROSTATIC FIELD

Authors

  • A. U. Utegenov al-Farabi Kazakh National University Scientific Research Institute of Experimental and The-oretical Physics (IETP), Almaty, Kazakhstan
  • Y. A. Ussenov al-Farabi Kazakh National University Scientific Research Institute of Experimental and The-oretical Physics (IETP), Almaty, Kazakhstan
  • M. K. Dosbolayev
  • T. S. Ramazanov al-Farabi Kazakh National University Scientific Research Institute of Experimental and The-oretical Physics (IETP), Almaty, Kazakhstan

Abstract

In this work the experimental results of probe diagnostics of radiofrequency discharge plasma imposed by additional electrostatic field are presented. IV characteristics of the probe in combined plasma, as well as axial distribution of electrons temperature are presented.

Key words: radiofrequency discharge, plasma, electrostatic field, probe diagnostics, electron temperature.

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Published

2021-03-26

Issue

Vol. 18 No. 2 (2016): ЖУРНАЛ ПРОБЛЕМ ЭВОЛЮЦИИ ОТКРЫТЫХ СИСТЕМ

Section

ФИЗИКА

How to Cite

PROBE DIAGNOSTICS OF RADIOFREQUENCY DISCHARGE PLASMA IMPOSED BY ADDITIONAL ELECTROSTATIC FIELD. (2021). Journal of Open Systems Evolution Problems, 18(2), 23-27. https://peos.kaznu.kz/index.php/peos/article/view/99