THE FORMATION OF TITANIUM DIOXIDE FILMS BY CHEMICAL VAPOR DEPOSITION FROM TiCl4 SOLUTION

Authors

  • Sh. Zh. Zhandildayeva Al-Farabi Kazakh National University, Almaty, Kazakhstan
  • S. B. Aldabergenova Al-Farabi Kazakh National University, Almaty, Kazakhstan
  • Sh. B. Baiganatova Al-Farabi Kazakh National University, Almaty, Kazakhstan
  • K. K. Dikhanbayev Al-Farabi Kazakh National University, Almaty, Kazakhstan
  • Ye. T. Taurbayev Al-Farabi Kazakh National University, Almaty, Kazakhstan

Abstract

In this paper we consider obtaining a titanium oxide film with a solution of TiCl4 by thermal pyrolysis on the surface of quartz glass and examine mikrotsrukturing and optical properties. During the experiment, spectra were measured by transmission, reflection, and Raman spectrum in addition considered a scanning electron microscope optical film.

Keywords: titanium dioxide, chemical vapor deposition, SEM measurement, light transmittance, the reflectance spectrum

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Published

2021-03-26

Issue

Vol. 18 No. 2 (2016): ЖУРНАЛ ПРОБЛЕМ ЭВОЛЮЦИИ ОТКРЫТЫХ СИСТЕМ

Section

ФИЗИКА

How to Cite

THE FORMATION OF TITANIUM DIOXIDE FILMS BY CHEMICAL VAPOR DEPOSITION FROM TiCl4 SOLUTION. (2021). Journal of Open Systems Evolution Problems, 18(2), 46-51. https://peos.kaznu.kz/index.php/peos/article/view/103