SECONDARY ION MASS SPECTROSCOPY OF PHOSPHORUS DOPED SILICON NANOWIRES. Journal of open systems evolution problems, [S. l.], v. 19, n. 2, p. 75–81, 2021. Disponível em: https://peos.kaznu.kz/index.php/peos/article/view/63. Acesso em: 5 jul. 2026.