THE INFLUENCE OF CATHODE SPUTTERING ON THE PROPERTIES OF DC GAS-DISCHARGE PLASMA. Journal of open systems evolution problems, [S. l.], v. 21, n. 3-4, p. 53–59, 2023. Disponível em: https://peos.kaznu.kz/index.php/peos/article/view/271. Acesso em: 5 jul. 2026.