OBTAINING OF NANOSTRUCTURED COMPOSITE PARTICLES AND FILMS IN A COMPLEX PLASMA BY MAGNETRON SPUTTERING. Journal of open systems evolution problems, [S. l.], v. 20, n. 2, p. 22–29, 2020. Disponível em: https://peos.kaznu.kz/index.php/peos/article/view/26. Acesso em: 5 jul. 2026.